Horiba Concentration monitor

• High repeatability accuracy
• 2 Sec data measurement cycle
• Compact design
• Continuous measurement

Reticle Mask Inspection Tool

• High Throughtput Reticle/mask Particle Detection System
• Easy and Reliable Operation
• Low Running Cost
• Small Foot Print.
• Cost effective
• Wide Purpose
• Easy To Replace For Old PD Series

Inline Particle Counter

The PLCA-800 counts the number of particles found in the various solutions used in the semiconductor fabrication process. In particular, the wet cleaning process is an effective way of removing particles. In this connection, sensors that can detect particles in liquids in real time are becoming an indispensable part of the process. The PLCA-800 is an ideal sensor for the in-line measurement of particles in solutions and resists.

Silica Analyzer

• Five-Minute Measuring with ±2%/FS Repeatability
• Wide Measurement Range Standard
• Self-Diagnostic Function
• Automatic Switching of Measuring Cycle
• Auto-Calibration for Increased Measurement Reliability

Portable Dissolved Oxygen Monitor

• Portable design for easy operation
• Achieve a Wide-range of highly sensitive measurements
• High-speed response
• Flat panel design for use in clean room
• Durable internal liquid replacement sensor
• Standard-feature Analog/Serial output

Full Automatic Spectroscopic Ellipsometer

• PEM * element without mechanical vibration obtains fast and accurate measurements
• From 1 nm ultra-thin films to multilayer films for flush memory devices
• Fast (100 ms) and highly sensitive measurement
• Flexible enough to support cutting-edge technology and state-of-the art automated lines
• Accepts 12-, 8-, and 6-inch wafer sizes
• Easy operation and detailed setting options
• Software enables fully automated analysis of complex and multilayer films
• Fully automated evaluation enables continuous measurement

Daico Quartz Product

Daico quartz products are customized to enduser requirement with high purity and high precision. Daico has the capability to produce synthesized quartz for replacement of fused quartz for high purity application. Some of the common quartz product are Quartz boat, Quartz Heater, Quartz Chamber etc.

STEC Mass Flow Controller

STEC is the world recognized leader in flow measurement and control for both gases and liquid. Mass flow controllers are critical components in semiconductor manufacturing system demands high performance and reliability which can be delivered by STEC.